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Kinetic Monte Carlo Study of the Atomic Layer Deposition of Zinc Oxide
Weckman, Timo, Shirazi, Mahdi, Elliott, Simon D., Laasonen, Kari ErikLanguage:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.8b06909
Date:
October, 2018
File:
PDF, 4.39 MB
english, 2018