CMOS-compatible Si metasurface at visible wavelengths...

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CMOS-compatible Si metasurface at visible wavelengths prepared by low-temperature green laser annealing

Lee, Jeong Yub, Kim, Yongsung, Han, Seunghoon, Kim, Jaekwan, Yoon, Jae Woong, Lee, Ki Young, Song, Seok Ho, Yang, Kiyeon, Lee, ChangSeung
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Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aaecbd
Date:
October, 2018
File:
PDF, 1.06 MB
english, 2018
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