Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 11 Vol. 36; Iss. 6
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Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography
Lenk, Claudia, Hofmann, Martin, Ivanov, Tzvetan, Ahmad, Ahmad, Lenk, Steve, Rangelow, Ivo W., Reum, Alexander, Reuter, Christoph, Holz, Mathias, Behzadirad, Mahmoud, Rishinaramangalam, Ashwin K., FeezVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5048190
Date:
November, 2018
File:
PDF, 1.45 MB
english, 2018