Electron Beam Effects on Silicon Oxide Films – Structure...

Microscopy and Microanalysis 2018 / 08 Vol. 24; Iss. S1

Electron Beam Effects on Silicon Oxide Films – Structure and Electrical Properties

Neelisetty, Krishna Kanth, Gutsch, Sebastian, von Seggern, Falk, Molinari, Alan, Vahl, Alexander, Mu, Xiaoke, Scherer, Torsten, Kiran, Chakravadhanula VS, Kübel, Christian
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Volume:
24
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927618009534
Date:
August, 2018
File:
PDF, 394 KB
english, 2018
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