Design and Modeling of a MEMS Dual-Backplate Capacitive...

Sensors 2018 / 10 Vol. 18; Iss. 10

Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications

Peña-García, Néstor N., Aguilera-Cortés, Luz A., González-Palacios, Max A., Raskin, Jean-Pierre, Herrera-May, Agustín L.
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Volume:
18
Language:
english
Journal:
Sensors
DOI:
10.3390/s18103545
Date:
October, 2018
File:
PDF, 7.76 MB
english, 2018
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