Fundamental understanding of chemical processes in extreme ultraviolet resist materials
Kostko, Oleg, Xu, Bo, Ahmed, Musahid, Slaughter, Daniel S., Ogletree, D. Frank, Closser, Kristina D., Prendergast, David G., Naulleau, Patrick, Olynick, Deirdre L., Ashby, Paul D., Liu, Yi, Hinsberg,Volume:
149
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.5046521
Date:
October, 2018
File:
PDF, 1.15 MB
english, 2018