Microsacle PolySilicon Hemispherical Shell Resonating...

Journal of Physics Conference Series 2018 / 03 Vol. 986

Microsacle PolySilicon Hemispherical Shell Resonating Gyroscopes with Integrated Three-dimensional Curved Electrodes

Zhuang, Xuye, Chen, Binggen, Wang, Xinlong, Yu, Lei, Wang, Fan, Guo, Shuwen
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Volume:
986
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/986/1/012022
Date:
March, 2018
File:
PDF, 1.40 MB
english, 2018
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