Design, Fabrication, and Testing of a New Compact...

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IEEE Transactions on Automation Science and Engineering 2018

Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning

Wu, Zeyi, Xu, Qingsong
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Year:
2018
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/TASE.2018.2875711
File:
PDF, 3.10 MB
english, 2018
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