A Novel Topology for Process Variation-Tolerant Piezoelectric Micromachined Ultrasonic Transducers
Robichaud, Alexandre, Deslandes, Dominic, Cicek, Paul-Vahe, Nabki, FredericYear:
2018
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2018.2876384
File:
PDF, 2.30 MB
english, 2018