Al doped ZnO thin film deposition by thermionic vacuum arc

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Journal of Materials Science: Materials in Electronics 2018 / 11

Al doped ZnO thin film deposition by thermionic vacuum arc

Özgür, Mustafa, Pat, Suat, Mohammadigharehbagh, Reza, Musaoğlu, Caner, Demirkol, Uğur, Elmas, Saliha, Özen, Soner, Korkmaz, Şadan
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Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-018-0329-x
Date:
November, 2018
File:
PDF, 1.45 MB
english, 2018
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