Fiber Optic Fabry-Perot Pressure Sensor with Embedded MEMS...

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Journal of Lightwave Technology 2018

Fiber Optic Fabry-Perot Pressure Sensor with Embedded MEMS Micro-Cavity for Ultra-High Pressure Detection

Qi, Xiaoguang, Wang, Shuang, Jiang, Junfeng, Liu, Kun, Wang, Xue, Yang, Yiguang, Liu, Tiegen
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Year:
2018
Language:
english
Journal:
Journal of Lightwave Technology
DOI:
10.1109/JLT.2018.2876717
File:
PDF, 1.87 MB
english, 2018
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