Towards Atomic-Scale Fabrication in Silicon

Microscopy and Microanalysis 2018 / 08 Vol. 24; Iss. S1

Towards Atomic-Scale Fabrication in Silicon

Hudak, Bethany M., Jesse, Stephen, Song, Jiaming, Borisevich, Albina, Snijders, Paul C., Kalinin, Sergei V., Lupini, Andrew R.
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Volume:
24
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927618001289
Date:
August, 2018
File:
PDF, 1000 KB
english, 2018
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