Study on Properties of TiSi/C, TiSiN/C and TiSiO/C...

IOP Conference Series Materials Science and Engineering 2018 / 11 Vol. 439

Study on Properties of TiSi/C, TiSiN/C and TiSiO/C Multilayer Thin Films Prepared by High-Power Pulsed Magnetron Sputtering

Ke, Jun-Bin, Bi, Xian-Shun, Chang, Fa, Huang, Qing-Lin, Li, Wei
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Volume:
439
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/439/2/022019
Date:
November, 2018
File:
PDF, 1.30 MB
english, 2018
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