[IEEE 2018 20th International Symposium on High-Current Electronics (ISHCE) - Tomsk, Russia (2018.9.16-2018.9.22)] 2018 20th International Symposium on High-Current Electronics (ISHCE) - Forevacuum Plasma Electron Source for Dielectric Surface Treatment
Zenin, Aleksey, Bakeev, Ilya, Burachevsky, Yury, Klimov, Aleksandr, Oks, Efim, Yushkov, YuryYear:
2018
Language:
english
DOI:
10.1109/ISHCE.2018.8521231
File:
PDF, 194 KB
english, 2018