Review of Spatial Distribution Modes in a 2.45-GHz Hydrogen...

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Review of Spatial Distribution Modes in a 2.45-GHz Hydrogen Plasma

Megia-Macias, Ana, Cortazar, Osvaldo Daniel
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Year:
2018
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2018.2877604
File:
PDF, 3.04 MB
english, 2018
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