Process Variability for Devices at and beyond the 7 nm Node
Lorenz, J. K., Asenov, A., Baer, E., Barraud, S., Kluepfel, F., Millar, C., Nedjalkov, M.Volume:
7
Year:
2018
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0051811jss
File:
PDF, 1.33 MB
english, 2018