Cluster secondary ion emission of silicon: an influence of...

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Rapid Communications in Mass Spectrometry 2018 / 11

Cluster secondary ion emission of silicon: an influence of the samples’ dimensional features

Tolstogouzov, Alexander, Drozdov, Mikhail N., Belykh, Sergey F., Gololobov, Gennady P., Ieshkin, Aleksei E., Mazarov, Paul, Suvorov, Dmitriy V., Fu, Dejun, Pelenovich, Vasiliy, Zeng, Xiaomei, Zuo, Wen
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Language:
english
Journal:
Rapid Communications in Mass Spectrometry
DOI:
10.1002/rcm.8345
Date:
November, 2018
File:
PDF, 688 KB
english, 2018
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