A two-step growth route of ternary aluminium doped zirconium oxide film on silicon
Quah, Hock Jin, Hassan, Zainuriah, Lim, Way FoongLanguage:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2018.10.359
Date:
November, 2018
File:
PDF, 11.06 MB
english, 2018