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Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas
Wang, Junkang, Daineka, Dmitri, Elyaakoubi, Mustapha, Johnson, Erik V.Volume:
190
Language:
english
Journal:
Solar Energy Materials and Solar Cells
DOI:
10.1016/j.solmat.2018.10.014
Date:
February, 2019
File:
PDF, 1.82 MB
english, 2019