[IEEE 2018 IEEE International Interconnect Technology Conference (IITC) - Santa Clara, CA, USA (2018.6.4-2018.6.7)] 2018 IEEE International Interconnect Technology Conference (IITC) - Gas Phase Pore Stuffing (GPPS)
Fujikawa, M., Yamaguchi, T., Nozawa, S., Niino, R., Chanson, R., Gavan, K. Babaei, Lazzarino, F., de Marneffe, J-F.Year:
2018
Language:
english
DOI:
10.1109/IITC.2018.8430424
File:
PDF, 1.79 MB
english, 2018