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[IEEE 2017 IEEE 12th Nanotechnology Materials and Devices Conference (NMDC) - Singapore (2017.10.2-2017.10.4)] 2017 IEEE 12th Nanotechnology Materials and Devices Conference (NMDC) - Filling behavior and mold release force in UV nanoimprinting using PDMS mold in different atmosphere
Suzuki, Kenta, Youn, Sung-Won, Hiroshima, HiroshiYear:
2017
Language:
english
DOI:
10.1109/NMDC.2017.8350540
File:
PDF, 835 KB
english, 2017