Measurement of Outgassing Rate from Stainless Steel Chamber...

Measurement of Outgassing Rate from Stainless Steel Chamber for Ultra High Vacuum and Extreme High Vacuum.

SOUMA, Takeshi, MATSUDA, Hiroshi
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Volume:
41
Year:
1998
Journal:
SHINKU
DOI:
10.3131/jvsj.41.100
File:
PDF, 612 KB
1998
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