Effects of a photo-assisted electrochemical etching process...

Japanese Journal of Applied Physics 2018 / 12 Vol. 57; Iss. 12

Effects of a photo-assisted electrochemical etching process removing dry-etching damage in GaN

Matsumoto, Satoru, Toguchi, Masachika, Takeda, Kentaro, Narita, Tetsuo, Kachi, Tetsu, Sato, Taketomo
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.121001
Date:
December, 2018
File:
PDF, 1.81 MB
english, 2018
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