Pulsed plasma initiated chemical vapor deposition (PiCVD) of polymer layers − A kinetic model for the description of gas phase to surface interactions in pulsed plasma discharges
Loyer, François, Bulou, Simon, Choquet, Patrick, Boscher, Nicolas D.Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201800121
Date:
October, 2018
File:
PDF, 2.40 MB
english, 2018