A hybrid probe system for quantifying plasma parameters in...

Review of Scientific Instruments 2018 / 11 Vol. 89; Iss. 11

A hybrid probe system for quantifying plasma parameters in a 13.56 MHz capacitive coupled magnetized plasma

Joshi, J. K., Binwal, S., Karkari, S. K., Kumar, Sunil
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Volume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5053141
Date:
November, 2018
File:
PDF, 1.56 MB
english, 2018
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