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Growth and characterization of InxAl1-xN films on silicon substrate by magnetron sputtering method
Wang, Xuewen, Li, Zhenjie, Zhai, Chunxue, Ma, Jiaqi, Duan, Yuqi, Gao, Haibo, Su, Xingxing, Liu, Wenwen, Zhang, Zhiyong, Zhao, Wu, Yan, JunfengLanguage:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/aaef0d
Date:
November, 2018
File:
PDF, 1.26 MB
english, 2018