Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film
Liu, Qi, Ding, Guifu, Wang, Yipin, Yao, JinyuanVolume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9100514
Date:
October, 2018
File:
PDF, 5.00 MB
english, 2018