Scaling of black silicon processing time by high repetition...

MATEC Web of Conferences 2013 Vol. 8

Scaling of black silicon processing time by high repetition rate femtosecond lasers

Nava, Giorgio, Osellame, Roberto, Ramponi, Roberta, Vishnubhatla, Krishna Chaitanya, Bellouard, Y., Canioni, L.
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Volume:
8
Year:
2013
Language:
english
Journal:
MATEC Web of Conferences
DOI:
10.1051/matecconf/20130802007
File:
PDF, 1023 KB
english, 2013
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