Preparation and Characterization of Sprayed-Yttrium...

Coatings 2018 / 10 Vol. 8; Iss. 10

Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers

Lin, Tzu-Ken, Wuu, Dong-Sing, Huang, Shih-Yung, Wang, Wei-Kai
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Volume:
8
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings8100373
Date:
October, 2018
File:
PDF, 3.15 MB
english, 2018
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