Nanofabrication of plasmonic structures on insulating...

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Nanotechnology 2018 / 11

Nanofabrication of plasmonic structures on insulating substrates by resist-on-metal bilayer lift-off

Hahn, Choloong, Amyot-Bourgeois, Maude, Al-Shehab, Maryam, Northfield, Howard, Choi, Youngsun, Song, Seok Ho, Tait, Niall, Berini, Pierre
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Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aaefd6
Date:
November, 2018
File:
PDF, 1.02 MB
english, 2018
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