Optimal Design of Capacitive Micro Cantilever Beam...

Modern Applied Science 2009 / 08 Vol. 3; Iss. 9

Optimal Design of Capacitive Micro Cantilever Beam Accelerometer

Sidek, Othman, Miskam, Muhamad Azman, Khaleed, H.M.T, Alias, Mohd Fauzi, Mohd, Shukri Korakkottil Kunhi
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Volume:
3
Language:
english
Journal:
Modern Applied Science
DOI:
10.5539/mas.v3n9p16
Date:
August, 2009
File:
PDF, 503 KB
english, 2009
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