Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas
Berger, Birk, Berger, Birk, You, Kwangho, Lee, Hyo-Chang, Mussenbrock, Thomas, Awakowicz, Peter, Schulze, JulianLanguage:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aaefc7
Date:
November, 2018
File:
PDF, 2.62 MB
english, 2018