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[IEEE 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Paris, France (2018.7.8-2018.7.13)] 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Nano - Microscale Electrical Characterization of Copper Thru Silicon Vias in 3D Stacked Integrated Circuits
Allal, Djamel, Delvallee, Alexandra, Moran, Jose, Khan, Mohammad Saif, Piquemal, Francoi SYear:
2018
Language:
english
DOI:
10.1109/CPEM.2018.8501198
File:
PDF, 714 KB
english, 2018