Superlens-enhanced laser interference lithography

Applied Physics Express 2018 / 12 Vol. 11; Iss. 12

Superlens-enhanced laser interference lithography

Guo, Xudong, Li, Li, Hu, Yaowei, Cao, Liang, Dong, Litong, Wang, Lu, Ding, Ran, Weng, Zhankun, Song, Zhengxun, Xu, Hongmei, Yang, Zhen, Liu, Xianping, Tian, Yanling, Wang, Zuobin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.11.125201
Date:
December, 2018
File:
PDF, 13.34 MB
english, 2018
Conversion to is in progress
Conversion to is failed