Linewidth calibration using a metrological atomic force...

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Measurement Science and Technology 2018 / 11

Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism

Kizu, Ryosuke, Misumi, Ichiko, Hirai, Akiko, Kinoshita, Kazuto, Gonda, Satoshi
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Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aaf02a
Date:
November, 2018
File:
PDF, 1.95 MB
english, 2018
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