Role of the reactive sputtering deposition power in the...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 11 Vol. 36; Iss. 6

Role of the reactive sputtering deposition power in the phase control of cobalt oxide films

Azevedo Neto, Nilton Francelosi, Leite, Douglas M. G., Lisboa-Filho, Paulo N., da Silva, José H. D.
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5046952
Date:
November, 2018
File:
PDF, 1.37 MB
english, 2018
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