Substrate Temperature Dependent Properties of Sputtered...

Materials 2018 / 11 Vol. 11; Iss. 11

Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health

Fang, Liping, Jiang, Yidong, Zhu, Shengfa, Ding, Jingjing, Zhang, Dongxu, Yin, Anyi, Chen, Piheng
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Volume:
11
Language:
english
Journal:
Materials
DOI:
10.3390/ma11112196
Date:
November, 2018
File:
PDF, 3.13 MB
english, 2018
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