Study of SEM images obtained with an electron energy and...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

Study of SEM images obtained with an electron energy and take-off angle (E-θ) selective detector

Otsuka, Takeshi, Nakamura, Motohiro, Yamashita, Ken-ichi, Hara, Masaya, Timischl, Felix, Honda, Kazuhiro, Kudo, Masato, Kitamura, Shin-ichi
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927615009241
Date:
August, 2015
File:
PDF, 415 KB
english, 2015
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