Exploiting the in-situ Electrical X-ray Microscopy for Semiconductor Nano Devices Analysis by X-ray Nanoprobe Beamline at Taiwan Photon Source
Tseng, Shao-Chin, Lin, Bi-Hsuan, Li, Xiao-Yun, Lai, Yu-Sheng, Tseng, Po-Hsien, Lee, Chien-Yu, Chen, Bo-Yi, Yin, Gung-Chian, Hsu, Ming-Ying, Chang, Shih-Hung, Tang, Mau-TsuVolume:
24
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S143192761801440X
Date:
August, 2018
File:
PDF, 313 KB
english, 2018