Aluminum Patterned Electroplating from AlCl3–[EMIm]Cl Ionic...

Micromachines 2018 / 11 Vol. 9; Iss. 11

Aluminum Patterned Electroplating from AlCl3–[EMIm]Cl Ionic Liquid towards Microsystems Application

Al Farisi, Muhammad, Hertel, Silvia, Wiemer, Maik, Otto, Thomas
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Volume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9110589
Date:
November, 2018
File:
PDF, 11.22 MB
english, 2018
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