Morphology of multilayer AlN/SiN coatings with layers of different thickness
Kuznetsova, T A, Lapitskaya, V A, Chizhik, S A, Uglov, V V, Shymanski, V I, Kvasov, N TVolume:
443
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/443/1/012018
Date:
November, 2018
File:
PDF, 1000 KB
english, 2018