Instabilities and Plasma Flares in Moderate-Current Confined Magnetron Sputtering in Three Dimensions
Sahu, Bibhuti Bhusan, Wen, Long, Han, Jeon GeonVolume:
10
Language:
english
Journal:
Physical Review Applied
DOI:
10.1103/PhysRevApplied.10.054042
Date:
November, 2018
File:
PDF, 2.44 MB
english, 2018