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Experimental Characterization of the Influence of Transverse Prestrain on the Piezoresistive Coefficients of Heavily Doped n-Type Silicon
Balbola, Amr A., Kayed, Mohammed O., Moussa, Walied A.Year:
2018
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2018.2871687
File:
PDF, 2.74 MB
english, 2018