Etching Charactristic of LiNbO3 Crystal in Fluorine System...

IEEJ Transactions on Fundamentals and Materials 2000 Vol. 120; Iss. 2

Etching Charactristic of LiNbO3 Crystal in Fluorine System Gas Plasma RIE

Nishimura, Takashi, Ohta, Tomonari, Yoshikado, Shinzo
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Volume:
120
Year:
2000
Journal:
IEEJ Transactions on Fundamentals and Materials
DOI:
10.1541/ieejfms1990.120.2_198
File:
PDF, 2.52 MB
2000
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