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Low-temperature silicon oxidation using oxidizing radicals produced by catalytic decomposition of H 2 O/H 2 on heated tungsten wire
Katamune, Yūki, Negi, Takanobu, Tahara, Shinichi, Fukushima, Kazuya, Izumi, AkiraVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.120301
Date:
December, 2018
File:
PDF, 842 KB
english, 2018