Composition and Strain Evolution of Undoped Si...

ECS Transactions 2018 / 07 Vol. 86; Iss. 7

Composition and Strain Evolution of Undoped Si 0.8 Ge 0.2 Layers Submitted to UV-Nanosecond Laser Annealing

Dagault, Lea, Acosta-Alba, Pablo, Kerdilès, Sébastien, Barnes, Jean-Paul, Hartmann, Jean-Michel, Gergaud, Patrice, Nguyen, Than Tra, Grenier, Adeline, Aubin, Joris, Cristiano, Fuccio
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Volume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08607.0029ecst
Date:
July, 2018
File:
PDF, 1.15 MB
english, 2018
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