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[Computer Aided Chemical Engineering] 13th International Symposium on Process Systems Engineering (PSE 2018) Volume 44 || Multiscale Three-Dimensional CFD Modeling for PECVD of Amorphous Silicon Thin Films
Crose, MarquisYear:
2018
Language:
english
DOI:
10.1016/B978-0-444-64241-7.50400-6
File:
PDF, 888 KB
english, 2018