Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process
Wang, Wenqiang, Li, Chen, Xu, Wencai, Zou, HelinVolume:
12
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2016.0805
Date:
July, 2017
File:
PDF, 420 KB
english, 2017