[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Development of micro focus X-ray microscope equipped with high brightness Li/W < 111 > field emitter
Ohta, Shinichiro, Nagai, Shigekazu, Iwata, Tatsuo, Hata, KoichiYear:
2018
Language:
english
DOI:
10.1109/IVNC.2018.8520219
File:
PDF, 2.36 MB
english, 2018