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[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Silicon Cold Field Emission Electron Sources for Electron Microscopy Inspection Systems
Hill, Frances A., Lopez, Gary V., Garcia, Rudy F., Ioakeimidi, Katerina, Romero, Mike, Marks, Zefram D., Delgado, Gildardo R.Year:
2018
Language:
english
DOI:
10.1109/IVNC.2018.8520281
File:
PDF, 606 KB
english, 2018